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Molybdenum Contamination in Silicon: Detection and Impact on Device Performances
Codegoni, Davide, Polignano, Maria Luisa, Caputo, Daniele, Riva, Andrea, Blot, Emmanuel, Coulon, David, Maillot, Philippe, Pic, NicolasVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.145-146.123
File:
PDF, 592 KB
english, 2009