FTIR Study of Precipitation of Implanted Nitrogen in CZ-Si...

Solid State Phenomena 2005 Vol. 108-109

FTIR Study of Precipitation of Implanted Nitrogen in CZ-Si Annealed under High Hydrostatic Pressure

Akhmetov, V.D., Misiuk, Andrzej, Richter, Hans
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.157
File:
PDF, 431 KB
english, 2005
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