Hydrogen Incorporation into SiC Using Plasma-Hydrogenation
Koshka, Yaroslav, Draper, W.A., Lakshman, R.Y., Scofield, James D., Saddow, Stephen E.Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.389-393.569
File:
PDF, 311 KB
2002