Gettering by Voids in Silicon: A Comparison with other...

Gettering by Voids in Silicon: A Comparison with other Techniques

Raineri, Vito
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Volume:
57-58
Year:
1997
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.43
File:
PDF, 660 KB
english, 1997
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