Volume 57-58

Solid State Phenomena

Volume 57-58

1

Effect of Stress Induced Defects on Electrical Properties of Czochralski Grown Silicon

Misiuk, Andrzej, Jung, W., Surma, Barbara, Jun, J., Rozental, M.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 416 KB

1997

2

Raman Spectroscopy Investigation of Silicon Nanocrystals Formation in Silicon Nitride Films

Volodin, V.A., Efremov, M.D., Gritsenko, V.A.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 425 KB

1997

3

Gettering in Advanced Low Temperature Processes

Sadamitsu, S., Ogushi, S., Koike, Y., Reilly, N., Nagashima, T., Sano, Mizuka, Tsuya, H.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 673 KB

english, 1997

4

Heterogeneous Precipitation of Silicon Oxide in Silicon at Laser Induced Centres

Blums, Yu., Medvid, Arthur

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 686 KB

1997

5

Oxygen Precipitation in Silicon Thin Layers in the Presence of Carbon

Tkacheva, T.M., Petrov, G.N., Enisherlova, K.L., Rusak, T.F.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 682 KB

1997

6

Hydrogen Annealed Silicon Wafer

Nadahara, S., Kubota, H., Samata, S.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 429 KB

1997

7

Study of Surface Conduction Related Effects in GaAs MESFET's

Balakrishnan, V.R., Kumar, Vijay, Ghosh, S.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 571 KB

english, 1997

8

A Quantitative Method of Metal Impurities Depth Profiling for Gettering Evaluation in Silicon Wafers

Shabani, Mohammad B., Yoshimi, T., Okuuchi, S., Kaniava, A.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 649 KB

english, 1997

9

Defects Produced in Silicon by Reactive Ion Etching

Erzgräber, H.B., Richter, H.H., Aminpur, M.-A., Wolff, A., Blum, K.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 426 KB

1997

10

Microscopic Studies of Radiation Damage-Induced Defects Responsible for the Deterioration of High-Resistivity Silicon Detectors

Feick, H., Moll, Michael

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 422 KB

1997

11

Deformation Interaction of Defects in Crystal: Concept of Evaluation

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 429 KB

1997

12

Gettering by Voids in Silicon: A Comparison with other Techniques

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 660 KB

english, 1997

13

An Experimental Study of Ion Beam and ECR Hydrogenation of Self-Ion Implantation Damage in Silicon by Admittance Spectroscopy and X-Ray Triple Crystal Diffractometry

Kar, S., Zaumseil, P., Ashok, S.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 393 KB

english, 1997

14

On the Defect Structures in Te-Doped GaAs

Frigeri, C., Weyher, J.L., Jiménez, J., Martín, P., Müller, S.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 931 KB

1997

15

Silicon Wafer Technology: The Challenges towards the Gigabit Era

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 717 KB

english, 1997

16

Vacancy-Assisted Oxygen Precipitation Phenomena in Si

Falster, Robert, Pagani, M., Gambaro, D., Cornara, M., Olmo, M., Ferrero, G., Pichler, P., Jacob, M.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 493 KB

english, 1997

17

Lattice Defects in Si1-xGex Devices by Proton Irradiation and their Effect on Device Performance

Ohyama, H., Simoen, Eddy, Claeys, C., Vanhellemont, Jan, Takami, Y., Sunaga, H., Poortmans, J., Caymax, Matty

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 398 KB

1997

18

The Role of Grown-in Defects in Advanced Silicon Technology

Kissinger, G., Gräf, D., Vanhellemont, Jan, Lambert, U., Richter, Hans

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 515 KB

1997

19

Analytical Modeling of the Gold Diffusion Induced Modification of the Forward Current through P-N Silicon Junctions

Gaiseanu, F., Sachelarie, M., Sachelarie, D., Esteve, Jaume

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 311 KB

1997

20

Modification of the Recombination Activity of Dislocations in Silicon by Hydrogenation, Phosphorous Diffusion and Heat Treatments

Seifert, Winfried, Knobloch, K., Kittler, Martin

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 502 KB

1997

21

Initial Stage of Oxygen Precipitation in Silicon

Kornylo, A., Maksymov, A., Pashkovski, M., Savytskii, I.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 348 KB

1997

22

The Change of Au-ZnS and Au-CdS Diode Structure Parameters Caused by Low-Dose X-Ray Irradiation

Pavlyk, B., Horyn', Ya., Tsybulyak, B.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 360 KB

english, 1997

23

An IR Study of the Annealing Behaviour of A-Center in Silicon

Londos, Charalamos A., Sarlis, N.V., Fytros, L.G.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 414 KB

1997

24

Erbium in Silicon: Problems and Challenges

Binetti, Simona, Donghi, M., Pizzini, Sergio, Castaldini, Antonio, Cavallini, Anna, Fraboni, B., Sobolev, N.A.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 608 KB

english, 1997

25

Alpha-Particle Irradiation Induced Defects in Metal-Oxide-Semiconductor Silicon Transistor

Koman, B.P., Ivanochko, R.R., Shkolnyy, A.K.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 365 KB

1997

26

Strain and Gettering in Epitaxial Silicon Wafers

Kirscht, F.G., Shabani, Mohammad B., Yoshimi, T., Kim, Sang Bae, Snegirev, B., Wang, Cheng Ming, Williamson, L., Takashima, K., Taylor, P., Lange, D.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 578 KB

english, 1997

27

Improved Extraction of Si Substrate Parameters from Combined I-V and C-V Measurements on P-N Junction Diodes

Czerwinski, A., Simoen, Eddy, Vanhellemont, Jan, Tomaszewski, D., Gibki, J., Bakowski, A.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 443 KB

english, 1997

28

Formation of Grown-in Defects in CZ-Si Crystals

Hasebe, Mitsuhiro, Nakai, Katsuhiko, Ohashi, W., Ikematsu, Y., Mizutani, T., Iwasaki, T.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 829 KB

english, 1997

29

New Possibility of Impurities Express Determination by Laser Element Spark-Analyzer (LESA)

Tkacheva, T.M., Petrov, G.N., Vlasov, D.V.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 462 KB

1997

30

Comparison of External Gettering Efficiency of Phosphorus Diffusion, Aluminium-Silicon Alloying and Helium Implantation in Silicon Wafers

Gay, N., Martinuzzi, Santo

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 614 KB

1997

31

The Magnesium Related Luminescence in Silicon and its Quenching due to the Presence of Dislocations

Steinman, E.A., Leipner, H.S., Grimmeiss, Hermann G.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 426 KB

1997

32

The Effect of Dislocation Dissociation on the g-Tensor of Holes in Dislocation Related 1D Energy Band in Si

Kveder, Vitaly, Shalynin, A.I., Steinman, E.A., Izotov, A.N.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 409 KB

1997

33

Influence of the Surface Metal Spraying on the Dislocation Detachment Process in Silicon Crystals

Makara, V.A., Steblenko, L.P., Kolomiyets, A.M.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 455 KB

english, 1997

34

Nitridation Effects in n-CdTe

Gurumurthy, S., Bhat, H.L., Kumar, Vijay

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 409 KB

1997

35

Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon

Job, Reinhart, Fahrner, Wolfgang R., Ulyashin, Alexander G., Bumay, Yu.A., Ivanov, A.I., Palmetshofer, L.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 385 KB

1997

36

Yield Analysis of CMOS Ics

Schmitt-Landsiedel, D.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 669 KB

english, 1997

37

Observation of Vacancy Enhancement during Rapid Thermal Annealing in Nitrogen

Jacob, M., Pichler, P., Ryssel, Heiner, Falster, Robert, Cornara, M., Gambaro, D., Olmo, M., Pagani, M.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 346 KB

1997

38

Implementation of Low Thermal Budget Techniques to Si and SiGe MOSFET Device Processing

Glück, M., Hersener, J., Umbach, H.G., Rappich, J., Stein, J.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 473 KB

1997

39

Influence of Electric Field-Enhanced Emission on Deep Level Transient Spectra of Bandlike Extended Defects: NiSi2-Precipitates in Silicon

Hedemann, Henrik, Schröter, Wolfgang

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 432 KB

1997

40

Oxygen Precipitate Nucleation Process in Silicon with Different Oxygen Concentration and Structural Perfection

Antonova, I.V., Misiuk, Andrzej, Popov, V.P., Plotnikov, A.E., Surma, Barbara

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 639 KB

1997

41

Study of Oxygen Related Recombination Defects in Si by Temperature-Dependent Lifetime and EBIC Measurements

Gaubas, Eugenijus, Vanhellemont, Jan, Simoen, Eddy, Claeys, C., Seifert, Winfried

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 458 KB

english, 1997

42

Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal

Habu, R., Kawakami, Kazuto, Hasebe, Mitsuhiro

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 470 KB

english, 1997

43

A Model of Coupled Diffusion of Impurity Atoms and Point Defects in the Vicinity of Semiconductor Interfaces and Grain Boundaries

Velichko, O.I., Fedotov, A.K.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 367 KB

1997

44

Planar Solidification of Multicrystalline Silicon for Phtovoltaic Applications

Koch, Wolfgang, Häßler, C., Höfs, H.-U., Müller, A., Schwirtlich, I.A.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 1.19 MB

english, 1997

45

Use of Gettering and Defect Induced Processes in Ultra-Thin Buried Oxide Synthesis

Litovchenko, V.G., Efremov, A.A., Romanyuk, B.N., Melnik, V.P., Claeys, C.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 405 KB

1997

46

Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements

Armigliato, A., Balboni, R., Frabboni, S., Tixier, A., Carnevale, G.P., Colpani, P., Marmiroli, A.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 366 KB

1997

47

Mechanism of Slip Dislocation Generation by Oxide Precipitates in Czochralski Silicon Wafers

Sueoka, K., Akatsuka, M., Katahama, H., Adachi, N.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 586 KB

1997

48

Radiation Induced Defects InGaAs Photodiodes by 1-MeV Fast Neutrons

Ohyama, H., Simoen, Eddy, Claeys, C., Vanhellemont, Jan, Kudou, T., Takami, Y., Sunaga, H.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 400 KB

1997

49

Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon

Takahashi, H., Yamada-Kaneta, Hiroshi, Suezawa, Masashi

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 354 KB

1997

50

State of Oxygen and Growth Conditions

Tkacheva, T.M., Petrov, G.N.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 453 KB

1997

51

Effect of High Temperature Pre-Anneal on Oxygen Precipitates Nucleation Kinetics in Si

Falster, Robert, Cornara, M., Gambaro, D., Olmo, M., Pagani, M.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 520 KB

1997

52

Analyzing Oxygen Precipitation Using the Surface Photovoltage Technique (SPV)

Moens, P., Dobbelaere, W., Colpaert, T.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 512 KB

1997

53

Hydrogen Stimulated Destruction of Fe-B Pairs in p-Si

Yakimov, E.B., Parakhonsky, A.L.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 333 KB

1997

54

Metal Gettering by Defective Regions in Carbon-Implanted Silicon

Kögler, R., Kaschny, J.R., Yankov, R.A., Werner, P., Danilin, A.B., Skorupa, Wolfgang

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 422 KB

1997

55

Design: New Material Challenge for Silicon ULSI

Kimerling, Lionel C.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 386 KB

1997

56

Computer Simulation of Impurity Diffusion in the Vicinity of Grain Boundaries (Modified Fisher Model)

Fedotov, A.K., Chuiko, M., Rabyshko, A., Shumski, S.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 398 KB

1997

57

Raman and HREM Observation of Oriented Silicon Nanocrystals Inside Amorphous Silicon Films on Glass Substrates

Efremov, M.D., Bolotov, V.V., Volodin, V.A., Fedina, Liudmila I., Gutakovskij, A.A., Kochubei, S.A.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 554 KB

1997

58

Point Defect and Microdefect Dynamics in Czochralski-Grown Silicon: Simulations and Analysis of Self-Consistent Models

Sinno, T., Brown, R.A.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 388 KB

1997

59

Defect Formation during Erbium Implantation and Subsequent Annealing of Si:Er

Sobolev, N.A., Emel'yanov, A.M., Kudryavtsev, Yu.A., Kyutt, R.N., Makovijchuk, M.I., Nikolaev, Yu.A., Parshin, E.O., Sakharov, V.I., Serenkov, I.T., Shek, E.I., Shtel'makh, K.F.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 412 KB

1997

60

Depth Dependence of Dislocation Loop Dissolution Kinetics in Ion Implanted Silicon

Seibt, Michael, Huang, Yue Long, Plikat, B.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 388 KB

1997

61

Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers

Trauwaert, M.-A., Vanhellemont, Jan, Lambert, U., Gräf, D., Kenis, Karine, Mertens, Paul W., Heyns, Marc M.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 414 KB

1997

62

Capacitance Spectroscopy of Thin GaAs Layers Grown by Molecular Beam Epitaxy at Low Temperatures

Chaldyshev, V.V., Brounkov, P.N., Suvorova, A.A., Konnikov, S.G., Preobrazhenski, V.V., Putyato, M.A., Semyagin, B.R.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 387 KB

1997

63

Critical Resolved Shear Stress for a Dislocation Loop Growth, Stability and Retrogrowth in Silicon: Application to the 16 MEG DRAM

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 864 KB

english, 1997

64

Peculiarities of Raman Spectra and Real Structure of Ge1-xSix Solid Solution

Dietrich, B., Orlov, L.K.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 376 KB

1997

65

Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation

Ulyashin, Alexander G., Bumay, Yu.A., Job, Reinhart, Grabosch, G., Borchert, D., Fahrner, Wolfgang R., Diduk, A.Yu.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 425 KB

1997

66

Ge Concentration Effect on the Dislocation Mobility in the Bulk SiGe Alloy Single Crystals

Iunin, Yu.L., Orlov, Valeri I., Dyachenko-Dekov, D.V., Abrosimov, N.V., Rossolenko, S.N., Schröder, W.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 355 KB

1997

67

Positron Annihilation Rate and Broad Component of 1D-ACAR in Cz-Si and Fz-Si

Arutyunov, N.Yu.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 430 KB

1997

68

The Influence of Intrinsic Point Defects on Getter Formation in Silicon Wafers

Mil'vidskii, M.G., Voronkov, Vladimir, Enisherlova, K.L., Reznick, V.Ja.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 491 KB

1997

69

Defect Engineering Radiation Tolerant Silicon Detectors

MacEvoy, B.C., Watts, S.J.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 677 KB

english, 1997

70

Metallic Impurity Gettering in MeV Implanted Si

Kononchuk, O.V., Brown, R.A., Koveshnikov, Sergei V., Beaman, K.L., Gonzalez, F., Rozgonyi, George A.

Journal:

Solid State Phenomena

Year:

1997

Language:

english

File:

PDF, 508 KB

english, 1997

71

Lifetime Considerations for High-Energy Proton Irradiated Si p-n Junction Diodes

Simoen, Eddy, Vanhellemont, Jan, Claeys, C.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 434 KB

1997

72

CZ Crystal Growth Development in Super Silicon Crystal Project

Yamagishi, H., Kuramoto, M., Shiraishi, Y., Machida, M., Takano, K., Takase, N., Iida, T., Matsubara, J., Takada, Kazuya

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 253 KB

1997

73

Diffusion and Precipitation of Oxygen in Silicon Doped with Germanium

Khirunenko, L.I., Pomozov, Yu.V., Shakhovtsov, V.I., Shumov, V.V.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 308 KB

1997

74

Thermal Donors in Silicon Doped with Erbium

Emtsev, Valentin V., Sobolev, N.A., Andreev, Boris A., Poloskin, D.S., Shek, E.I.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 338 KB

1997

75

Interaction of Impurities and Dislocations in Silicon before and after External Gettering

Périchaud, Isabelle, Martinuzzi, Santo

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 697 KB

1997

76

X-Ray Diffractometry and Admittance Spectroscopy Investigation of Silicon Implanted at Low Energies with Oxygen, Argon, or Silicon

Zaumseil, P., Kar, S.

Journal:

Solid State Phenomena

Year:

1997

File:

PDF, 419 KB

1997

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