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Phase shifts and energy dissipations of several modes of AFM: Minimizing topography and dissipation measurement errors
Shueei-Muh Lin, Cheng-Che LinVolume:
33
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.precisioneng.2008.10.005
File:
PDF, 406 KB
english, 2009