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Volume 33; Issue 4
Main
Precision Engineering
Volume 33; Issue 4
Precision Engineering
Volume 33; Issue 4
1
Optimization of alignment in semiconductor lithography equipment
Ryuhei Miyashiro
,
Youzou Fukagawa
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.42 MB
Your tags:
english, 2009
2
On the magnification of two-dimensional contouring errors by using contour-parallel offsets
Soichi Ibaraki
,
Atsushi Matsubara
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.36 MB
Your tags:
english, 2009
3
The statistical gauge in geometrical verification. Part II. The virtual gauge and verification process
Jean Maihle
,
Jean Marc Linares
,
Jean Michel Sprauel
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.23 MB
Your tags:
english, 2009
4
First and second order periodic error measurement for non-constant velocity motions
Tony L. Schmitz
,
David C. Chu
,
Hyo Soo Kim
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.50 MB
Your tags:
english, 2009
5
Development of a high precision flexure-based microgripper
Mohd Nashrul Mohd Zubir
,
Bijan Shirinzadeh
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.51 MB
Your tags:
english, 2009
6
Towards flexible medical instruments: Review of flexible fluidic actuators
Aline De Greef
,
Pierre Lambert
,
Alain Delchambre
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 912 KB
Your tags:
english, 2009
7
Phase shifts and energy dissipations of several modes of AFM: Minimizing topography and dissipation measurement errors
Shueei-Muh Lin
,
Cheng-Che Lin
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 406 KB
Your tags:
english, 2009
8
A new probe design combining finite element method and optimization used for vertical probe card in wafer probing
Jinn-Tong Chiu
,
Dar-Yuan Chang
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.17 MB
Your tags:
english, 2009
9
Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
Jiwang Yan
,
Tooru Asami
,
Hirofumi Harada
,
Tsunemoto Kuriyagawa
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.87 MB
Your tags:
english, 2009
10
Design evaluation of a single-axis precision controlled positioning stage
Eric S. Buice
,
David Otten
,
Raymond H. Yang
,
Stuart T. Smith
,
Robert J. Hocken
,
David L. Trumper
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.75 MB
Your tags:
english, 2009
11
On-line diagnostics in the Mobile Spatial coordinate Measuring System (MScMS)
Fiorenzo Franceschini
,
Maurizio Galetto
,
Domenico Maisano
,
Luca Mastrogiacomo
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.16 MB
Your tags:
english, 2009
12
Effects of the heat source profiles on the thermal distribution for ultraprecision grinding
Y. Tian
,
B. Shirinzadeh
,
D. Zhang
,
X. Liu
,
D. Chetwynd
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.93 MB
Your tags:
english, 2009
13
Calibration-based thermal error model for articulated arm coordinate measuring machines
Jorge Santolaria
,
José-Antonio Yagüe
,
Roberto Jiménez
,
Juan-José Aguilar
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.26 MB
Your tags:
english, 2009
14
Design and forward kinematics of the compliant micro-manipulator with lever mechanisms
Y. Tian
,
B. Shirinzadeh
,
D. Zhang
,
X. Liu
,
D. Chetwynd
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.65 MB
Your tags:
english, 2009
15
Study on long life of artificial joints by investigating optimal sliding surface geometry for improvement in wear resistance
Hiroshi Sawano
,
Shin’ichi Warisawa
,
Sunao Ishihara
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.45 MB
Your tags:
english, 2009
16
Machine tool calibration: Geometric test uncertainty depends on machine tool performance
B. Bringmann
,
W. Knapp
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 913 KB
Your tags:
english, 2009
17
A unified localization approach for machining allowance optimization of complex curved surfaces
Yu-wen Sun
,
Jin-ting Xu
,
Dong-ming Guo
,
Zhen-yuan Jia
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 630 KB
Your tags:
english, 2009
18
Silicon end-effectors for microgripping tasks
Joël Agnus
,
David Hériban
,
Michaël Gauthier
,
Valérie Pétrini
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.09 MB
Your tags:
english, 2009
19
A new model for general polygon matching problems
Jyunping Huang
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 883 KB
Your tags:
english, 2009
20
Editorial Board
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 37 KB
Your tags:
english, 2009
21
Calendar
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 79 KB
Your tags:
english, 2009
22
The statistical gauge in geometrical verification: Part I. Field of probability of the presence of matter
Jean Maihle
,
Jean Marc Linares
,
Jean Michel Sprauel
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 696 KB
Your tags:
english, 2009
23
Design and characterization of a PZT driven micromachining tool based on single-point tool tip geometry
Sumet Heamawatanachai
,
Eberhard Bamberg
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.73 MB
Your tags:
english, 2009
24
Size effect and tool geometry in micromilling of tool steel
A. Aramcharoen
,
P.T. Mativenga
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 948 KB
Your tags:
english, 2009
25
Development of a cutting tool with a nano/micro-textured surface—Improvement of anti-adhesive effect by considering the texture patterns
Tatsuya Sugihara
,
Toshiyuki Enomoto
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.35 MB
Your tags:
english, 2009
26
A hybrid 5-axis CNC milling machine
Seungkil Son
,
Taejung Kim
,
Sanjay E. Sarma
,
Alexander Slocum
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.85 MB
Your tags:
english, 2009
27
Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining
Xuan Doan Cao
,
Bo Hyun Kim
,
Chong Nam Chu
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.33 MB
Your tags:
english, 2009
28
Polishing of single point diamond tool based on thermo-chemical reaction with copper
Naomichi Furushiro
,
Masahiro Higuchi
,
Tomomi Yamaguchi
,
Shoichi Shimada
,
Kazushi Obata
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 919 KB
Your tags:
english, 2009
29
Research on chemo-mechanical grinding of large size quartz glass substrate
Libo Zhou
,
Takeshi Shiina
,
Zhongjun Qiu
,
Jun Shimizu
,
Takeyuki Yamamoto
,
Toshiaki Tashiro
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 1.30 MB
Your tags:
english, 2009
30
In-process modeling of dynamic tool-tip temperatures of a tunable vibration turning device operating at ultrasonic frequencies
Jerald L. Overcash
,
James F. Cuttino
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 2.00 MB
Your tags:
english, 2009
31
Comparison of angle standards with the aid of a high-resolution angle encoder
A. Just
,
M. Krause
,
R. Probst
,
H. Bosse
,
H. Haunerdinger
,
Ch. Spaeth
,
G. Metz
,
W. Israel
Journal:
Precision Engineering
Year:
2009
Language:
english
File:
PDF, 463 KB
Your tags:
english, 2009
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