Fundamental investigation of subsurface damage in single...

Precision Engineering 2009 Vol. 33; Iss. 4

Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining

Jiwang Yan, Tooru Asami, Hirofumi Harada, Tsunemoto Kuriyagawa
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Volume:
33
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.precisioneng.2008.10.008
File:
PDF, 1.87 MB
english, 2009
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