Design evaluation of a single-axis precision controlled positioning stage
Eric S. Buice, David Otten, Raymond H. Yang, Stuart T. Smith, Robert J. Hocken, David L. TrumperVolume:
33
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.precisioneng.2008.11.001
File:
PDF, 1.75 MB
english, 2009