Investigation of 3C-SiC Lateral Growth on 4H-SiC Mesas

Materials Science Forum 2011 / 3 Vol. 679-680

Investigation of 3C-SiC Lateral Growth on 4H-SiC Mesas

Lorenzzi, Jean, Jegenyes, Nikoletta, Lazar, Mihaï, Tournier, Dominique, Cauwet, François, Carole, Davy, Ferro, Gabriel
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Volume:
679-680
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.679-680.111
Date:
March, 2011
File:
PDF, 1.14 MB
english, 2011
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