Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques
Vanhellemont, Jan, Kissinger, G., Gräf, D., Kenis, Karine, Depas, M., Mertens, Paul W., Lambert, U., Heyns, Marc M., Claeys, C., Richter, Hans, Wagner, P.Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1755
File:
PDF, 381 KB
1995