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Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film
Ebihara, Kenji, Ikegami, TomoakiVolume:
140-142
Year:
1993
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.140-142.457
File:
PDF, 516 KB
1993