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Drying of High Aspect Ratio Structures: A Comparison of Drying Techniques via Electrical Stiction Analysis
Pacco, Antoine, Wada, Masayuki, Bearda, Twan, Mertens, Paul W.Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.87
File:
PDF, 336 KB
english, 2009