Atomic-Step Observations on 6H- and 15R-SiC Polished...

Materials Science Forum 2002 Vol. 389-393

Atomic-Step Observations on 6H- and 15R-SiC Polished Surfaces

Vicente, Patrice, Pernot, Etienne, Chaussende, Didier, Camassel, Jean
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.729
File:
PDF, 329 KB
2002
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