Growth and Evaluation of High Quality SiC Crystal by...

Materials Science Forum 2002 Vol. 389-393

Growth and Evaluation of High Quality SiC Crystal by Sublimation Method

Oyanagi, Naoki, Yamaguchi, Hirotaka, Kato, Tomohisa, Nishizawa, Shinichi, Arai, Kazuo
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.87
File:
PDF, 322 KB
2002
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