Evaluation of Carbonized Layers for 3C-SiC/Si Epitaxial Growth by Ellipsometry
Shimizu, Hideki, Ohba, Takaomi, Hisada, KensakuVolume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.335
File:
PDF, 322 KB
2002