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Fabrication of X-ray masks and applications for optical switch molding
X.C. Shan, R. Maeda, T. Ikehara, H. Mekaru, T. HattoriVolume:
108
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2003.06.001
File:
PDF, 585 KB
english, 2003