Volume 108; Issue 1-3

Sensors and Actuators A: Physical

Volume 108; Issue 1-3

1

A novel planarization process for polysilicon sacrificial layers in a micro-thermal system

H.R. Chen, C. Gau, B.T. Dai, M.S. Tsai

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 287 KB

english, 2003

2

A microchip for electroporation of primary endothelial cells

Yu-Cheng Lin, Min Li, Chun-Sheng Fan, Li-Wha Wu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 536 KB

english, 2003

3

Fabrication of X-ray masks and applications for optical switch molding

X.C. Shan, R. Maeda, T. Ikehara, H. Mekaru, T. Hattori

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 585 KB

english, 2003

4

Fabrication and characterization of thick porous silicon layers for rf circuits

S.Z. You, Y.F. Long, Y.S. Xu, Z.Q. Zhu, Y.L. Shi, Z.S. Lai, Z.F. Li, W. Lu, A.Z. Li

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 168 KB

english, 2003

5

A monolithic fabrication process for a micro-flow heat transfer channel suspended over an air layer with arrays of micro-sensors and heaters

H.R. Chen, C. Gau, B.T. Dai, M.S. Tsai

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 383 KB

english, 2003

6

Nano-indentation method for the measurement of the Poisson’s ratio of MEMS thin films

Jong-Hoon Kim, Soon-Chang Yeon, Yun-Kwang Jeon, Jeong-Gil Kim, Yong-Hyup Kim

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 527 KB

english, 2003

7

Fabrication of platinum spherical electrodes in an intra-ocular prosthesis using high-energy electrical discharge

G.J. Suaning, N.H. Lovell, C.Y. Kwok

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 313 KB

english, 2003

8

Study on piezoresistive effect of diamond films under magnetic field

W.L. Wang, K.J. Liao, C.G. Hu, S.X. Wang, C.Y. Kong, H.Y. Liao

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 114 KB

english, 2003

9

Point temperature sensor based on green upconversion emission in an Er:ZBLALiP microsphere

Z.P. Cai, H.Y. Xu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 330 KB

english, 2003

10

A novel high temperature pressure sensor on the basis of SOI layers

Zhao Yulong, Zhao Libo, Jiang Zhuangde

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 164 KB

english, 2003

11

Polysilicon micromachined fiber-optical attenuator for DWDM applications

X.M. Zhang, A.Q. Liu, C. Lu, F. Wang, Z.S. Liu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 376 KB

english, 2003

12

Research on electric field and electric breakdown problems of a micro-colloid thruster

Jijun Xiong, Zhaoying Zhou, Xiongying Ye, Xiaohao Wang, Yanyin Feng

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 143 KB

english, 2003

13

A novel glucose sensor system with Au nanoparticles based on microdialysis and coenzymes for continuous glucose monitoring

Min Pan, Xishan Guo, Qiang Cai, Guang Li, Yuquan Chen

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 206 KB

english, 2003

14

Spatial light modulators based on micromachined reflective membranes on viscoelastic layers

S. Sakarya, G. Vdovin, P.M. Sarro

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 196 KB

english, 2003

15

Monolithically integrated PCR biochip for DNA amplification

Zhan Zhao, Zheng Cui, Dafu Cui, Shanhong Xia

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 230 KB

english, 2003

16

Microstructure and electrical properties of Pb(Zr, Ti)O3 thick film prepared by electrostatic spray deposition

Jian Lu, Jiaru Chu, Wenhao Huang, Zhiming Ping

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 269 KB

english, 2003

17

High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Vu Ngoc Hung, Takashi Abe, Phan Ngoc Minh, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 105 KB

english, 2003

18

Design and simulation of a microheater actuated by a PZT microcantilever for high density data storage

Gang Zhao, Jiaru Chu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 158 KB

english, 2003

19

Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections

Takashi Abe, Xinghua Li, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 416 KB

english, 2003

20

Squeeze-film air damping of thick hole-plate

Minhang Bao, Heng Yang, Yuancheng Sun, Yuelin Wang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 160 KB

english, 2003

21

Single crystal silicon rotary microactuator for hard disk drive

J.Q. Mou, Y. Lu, J.P. Yang, Q.H. Li

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 304 KB

english, 2003

22

Experimental research on piezoelectric array microjet

Songmei Yuan, Zhaoying Zhou, Guohui Wang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 356 KB

english, 2003

23

A fast and accurate calibration method for high sensitivity pressure transducers

Minhang Bao, Yuancheng Sun, Heng Yang, Jinsuo Wang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 154 KB

english, 2003

24

A piezoelectrically actuated micro synthetic jet for active flow control

Chester Lee, Guang Hong, Q.P. Ha, S.G. Mallinson

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 179 KB

english, 2003

25

A circular-type thermal flow direction sensor free from temperature compensation

Seunghyun Kim, Sunghyun Kim, Yongduk Kim, Sekwang Park

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 274 KB

english, 2003

26

Single crystal silicon piezoresistive nano-wire bridge

T. Toriyama, S. Sugiyama

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 224 KB

english, 2003

27

Deep X-ray mask with integrated actuator for 3D microfabrication

Kwang-Cheol Lee, Seung S. Lee

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 189 KB

english, 2003

28

Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater

Mitsuteru Kimura, Katsuhisa Toshima

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 344 KB

english, 2003

29

Mechanical characterization of micromachined capacitive switches: design consideration and experimental verification

J.-M. Huang, A.Q. Liu, C. Lu, J. Ahn

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 329 KB

english, 2003

30

A foveated-structure CMOS retina chip for edge detection with local light adaptation

Dae-Sik Park, Jung-Hwan Kim, Hyun-Soo Kim, Jong-Ho Park, Jang-Kyoo Shin, Minho Lee

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 433 KB

english, 2003

31

Investigation of sol–gel prepared Ga–Zn oxide thin films for oxygen gas sensing

A. Trinchi, Y.X. Li, W. Wlodarski, S. Kaciulis, L. Pandolfi, S.P. Russo, J. Duplessis, S. Viticoli

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 375 KB

english, 2003

32

Acoustic and electromechanical properties of 1–3 PZT composites for ultrasonic transducer arrays fabricated by sacrificial micro PMMA mold

Joon-Shik Park, Sun-Ho Lee, Soon-Sup Park, Jin-Woo Cho, Suk-Won Jung, Jin-Ho Han, Sung-Goon Kang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 253 KB

english, 2003

33

Passive valves based on hydrophobic microfluidics

Yanying Feng, Zhaoying Zhou, Xiongying Ye, Jijun Xiong

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 256 KB

english, 2003

34

Laser assisted surface nanopatterning

M.H. Hong, S.M. Huang, B.S. Luk’yanchuk, T.C. Chong

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 390 KB

english, 2003

35

Fabrication and characterization of torsion-mirror actuators for optical networking applications

W.G. Wu, D.C. Li, W. Sun, Y.L. Hao, G.Z. Yan, S.J. Jin

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 477 KB

english, 2003

36

Fabrication of alloy and ceramic microstructures by LIGA–MA–SPS process

Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama, Susumu Sugiyama

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 828 KB

english, 2003

37

Single-/multi-mode tunable lasers using MEMS mirror and grating

A.Q. Liu, X.M. Zhang, J. Li, C. Lu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 322 KB

english, 2003

38

Microfabrication of thermoelectric materials by silicon molding process

Jing-Feng Li, Shuji Tanaka, Toshiya Umeki, Shinya Sugimoto, Masayoshi Esashi, Ryuzo Watanabe

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 574 KB

english, 2003

39

3-D microarrays biochip for DNA amplification in polydimethylsiloxane (PDMS) elastomer

Xiaomei Yu, Dacheng Zhang, Ting Li, Lin Hao, Xiuhan Li

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 107 KB

english, 2003

40

Localized electrochemical micromachining with gap control

Li Yong, Zheng Yunfei, Yang Guang, Peng Liangqiang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 264 KB

english, 2003

41

Study on low voltage actuated MEMS rf capacitive switches

F.M Guo, Z.Q Zhu, Y.F Long, W.M Wang, S.Z Zhu, Z.S Lai, N Li, G.Q Yang, W Lu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 454 KB

english, 2003

42

A piezodriven XY-microstage for multiprobe nanorecording

Deyuan Zhang, Chienliu Chang, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 310 KB

english, 2003

43

Effects of temperatures on microstructures and bonding strengths of Si–Si bonding using bisbenzocyclobutene

Yeon-Shik Choi, Joon-Shik Park, Hyo-Derk Park, Young-Hwa Song, Jin-Soo Jung, Sung-Goon Kang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 438 KB

english, 2003

44

A homogeneously catalyzed micro-chemical thruster

Chen Xupeng, Li Yong, Zhou Zhaoying, Fan Ruili

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 340 KB

english, 2003

45

Fabrication planar coil on oxide membrane hollowed with porous silicon as sacrificial layer

Zewen Liu, Yong Ding, Litian Liu, Zhijian Li

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 383 KB

english, 2003

46

Prelim(iii) Title and editorial board

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 41 KB

english, 2003

47

Conference Calender

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 28 KB

english, 2003

48

List of conferences

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 36 KB

english, 2003

49

Author index

Journal:

Sensors and Actuators A: Physical

Year:

2003

File:

PDF, 29 KB

2003

50

Subject index

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 55 KB

english, 2003

51

PREFACE

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 25 KB

english, 2003

52

Erratum to “Micro capillary electrophoresis chips integrated with buried SU-8/SOG optical waveguides for bio-analytical applications”: [Sensors and Actuators A 107 (2003) 125–131]

Che-Hsin Lin, Gwo-Bin Lee, Shu-Hui Chen, Guan-Liang Chang

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 27 KB

english, 2003

53

A novel micro-well array chip for liquid phase biomaterial processing and detection

Henry J.H. Chen, Tsai Fen Chen, Star R.S. Huang, Jeng Gong, J.C Li, Wei Chen Chen, T.H. Hseu, Ian C. Hsu

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 598 KB

english, 2003

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