Measurement for fracture toughness of single crystal...

Sensors and Actuators A: Physical 2005 Vol. 119; Iss. 1

Measurement for fracture toughness of single crystal silicon film with tensile test

Xueping Li, Takashi Kasai, Shigeki Nakao, Hiroshi Tanaka, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato
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Volume:
119
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2003.10.063
File:
PDF, 412 KB
english, 2005
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