Volume 119; Issue 1

Sensors and Actuators A: Physical

Volume 119; Issue 1

1

Measurement for fracture toughness of single crystal silicon film with tensile test

Xueping Li, Takashi Kasai, Shigeki Nakao, Hiroshi Tanaka, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 412 KB

english, 2005

2

Development of hydraulic linear actuator using thin film SMA

Daniel D. Shin, Kotekar P. Mohanchandra, Gregory P. Carman

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 353 KB

english, 2005

3

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

C.M. Waits, B. Morgan, M. Kastantin, R. Ghodssi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 402 KB

english, 2005

4

Actuation by electrostatic repulsion by nonvolatile charge injection

Zengtao Liu, Myongseob Kim, Nick Yu-Min Shen, Edwin C. Kan

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 546 KB

english, 2005

5

Erratum to “Accurate system-level damping model for highly perforated micromechanical devices” [Sens. Acutators A 111 (2004) 222–228]

Gabriele Schrag, Gerhard Wachutka

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 80 KB

english, 2005

6

Fem modelling of an electro-optical micro-shutter

P. Roux, E. Woirgard, M. Pizzi, O. De Martiis, V. Koniachkine

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 426 KB

english, 2005

7

Development and analysis of the vertical capacitive accelerometer

Innam Lee, Gil Ho Yoon, Jungyul Park, Seonho Seok, Kukjin Chun, Kyo-Il Lee

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 537 KB

english, 2005

8

Nanoliter segment formation in micro fluid devices for chemical and biological micro serial flow processes in dependence on flow rate and viscosity

J.M. Köhler, T. Kirner

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 389 KB

english, 2005

9

Effects of mechanical agitation and surfactant additive on silicon anisotropic etching in alkaline KOH solution

Chii-Rong Yang, Po-Ying Chen, Yuang-Cherng Chiou, Rong-Tsong Lee

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 416 KB

english, 2005

10

Performance and package effect of a novel piezoresistive pressure sensor fabricated by front-side etching technology

Chih-Tang Peng, Ji-Cheng Lin, Chun-Te Lin, Kuo-Ning Chiang

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 1014 KB

english, 2005

11

Dynamic characterization of a thermocouple in a fluid crossflow

Cherif Ould Lahoucine, Abdallah Khellaf

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 287 KB

english, 2005

12

Micromechanical tunable optical filters: general design rules for wavelengths from near-IR up to 10 μm

Carlos F.R. Mateus, Michael C.Y. Huang, Connie J. Chang-Hasnain

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 243 KB

english, 2005

13

Analysis of power supply interference effects on quasi-digital sensors

Ferran Reverter, Manel Gasulla, Ramon Pallàs-Areny

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 388 KB

english, 2005

14

Nonlinear compensation of active electrostatic bearings supporting a spherical rotor

Fengtian Han, Zhongyu Gao, Dongmei Li, Yongliang Wang

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 272 KB

english, 2005

15

An analytical design methodology for microelectromechanical (MEM) filters

Yasar Gurbuz, Mustafa Parlak, Thomas F. Bechteler, Ayhan Bozkurt

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 357 KB

english, 2005

16

Enhanced hydrogen-sensing characteristics of MISiC Schottky-diode hydrogen sensor by trichloroethylene oxidation

W.M. Tang, P.T. Lai, J.P. Xu, C.L. Chan

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 146 KB

english, 2005

17

Temperature-controlled fiber Bragg grating dynamic strain detection system

Xiao-Dong Wu, Cornelia Schmidt-Hattenberger, Kay Krüger, Jun Chen

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 267 KB

english, 2005

18

Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane

R.M. Tiggelaar, P. van Male, J.W. Berenschot, J.G.E. Gardeniers, R.E. Oosterbroek, M.H.J.M. de Croon, J.C. Schouten, A. van den Berg, M.C. Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 565 KB

english, 2005

19

Design and evaluation of linear ultrasonic motors for a cardiac compression assist device

Yang Ming, Zhu Meiling, Robert C. Richardson, Martin C. Levesley, Peter G. Walker, Kevin Watterson

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 239 KB

english, 2005

20

The influence of noise on output of Ring Laser Gyroscope

Wang Kedong, Yan Lei, Gu Qitai

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 763 KB

english, 2005

21

A compact fibre-based fluorescence sensor

Mohammad Ahmad, Kuang-Po Chang, T.A. King, Larry L. Hench

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 156 KB

english, 2005

22

Study of the effect of solvent induced swelling on the resistivity of butadiene based elastomers filled with carbon particles: Part I. Elucidating second order effects

Antonio Carrillo, Ignacio R. Martín-Domínguez, Daniel Glossman, Alfredo Márquez

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 275 KB

english, 2005

23

Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications

Xiao-An Fu, Jeremy L. Dunning, Christian A. Zorman, Mehran Mehregany

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 435 KB

english, 2005

24

Improvement of isolation for MEMS capacitive switch via membrane planarization

A.B. Yu, A.Q. Liu, Q.X. Zhang, A. Alphones, L. Zhu, A.P. Shacklock

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 515 KB

english, 2005

25

Linear μ-bending method for the measurement of the residual stress of surface-micromachined MEMS

Jong-Hoon Kim, Jeong-Gil Kim, Soon-Chang Yeon, Young-Keun Chang, Jun-Hee Hahn, Ho-Young Lee, Yong Hyup Kim

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 703 KB

english, 2005

26

Design of a capacitive-sensor signal processing system with high accuracy and short conversion time

An Sang Hou, Susan Xiao-Ping Su

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 286 KB

english, 2005

27

Finite element analysis of interference for the laterally coupled quartz crystal microbalances

F. Lu, H.P. Lee, P. Lu, S.P. Lim

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 708 KB

english, 2005

28

Ferroelectric active sensors

Lionel Cima, Denis Remiens

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 206 KB

english, 2005

29

Magnetic sensor response dependence on hysteresis effects

D.M. Kepaptsoglou, A. Ktena, E. Hristoforou

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 107 KB

english, 2005

30

A needle temperature microsensor for in vivo and real-time measurement of the temperature in acupoints

Renfa Cui, Jianhua Liu, Wentao Ma, Jiabing Hu, Xiaodong Zhou, Hongyi Li, Jiming Hu

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 228 KB

english, 2005

31

Effects of various ion-typed surfactants on silicon anisotropic etching properties in KOH and TMAH solutions

Chii-Rong Yang, Po-Ying Chen, Cheng-Hao Yang, Yuang-Cherng Chiou, Rong-Tsong Lee

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 640 KB

english, 2005

32

PZN-PZT flextensional actuator by co-extrusion process

Chang-Bun Yoon, Sung-Mi Lee, Seung-Ho Lee, Hyoun-Ee Kim

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 464 KB

english, 2005

33

Modeling hysteresis using hybrid method of continuous transformation and neural networks

Zhao Tong, Yonghong Tan, Xianwen Zeng

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 469 KB

english, 2005

34

Infrared integrated optical evanescent field sensor for gas analysis: Part I: System design

Ralf Siebert, Jörg Müller

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 774 KB

english, 2005

35

Inside Front Cover - editorial Board

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 64 KB

english, 2005

36

Author index

Journal:

Sensors and Actuators A: Physical

Year:

2005

File:

PDF, 38 KB

2005

37

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

WAITS, C, MORGAN, B, KASTANTIN, M, GHODSSI, R

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 402 KB

english, 2005

38

Actuation by electrostatic repulsion by nonvolatile charge injection

LIU, Z, KIM, M, SHEN, N, KAN, E

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 546 KB

english, 2005

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