Tether- and post-enabled flip-chip assembly for...

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 2-3

Tether- and post-enabled flip-chip assembly for manufacturable RF-MEMS

F.F. Faheem, Y.C. Lee
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Volume:
114
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2003.10.075
File:
PDF, 843 KB
english, 2004
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