Volume 114; Issue 2-3

Sensors and Actuators A: Physical

Volume 114; Issue 2-3

1

Bonding properties of metals anodically bonded to glass

Danick Briand, Patrick Weber, Nicolaas F. de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 142 KB

english, 2004

2

Towards the integration of textile sensors in a wireless monitoring suit

M. Catrysse, R. Puers, C. Hertleer, L. Van Langenhove, H. van Egmond, D. Matthys

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 537 KB

english, 2004

3

Tether- and post-enabled flip-chip assembly for manufacturable RF-MEMS

F.F. Faheem, Y.C. Lee

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 843 KB

english, 2004

4

Micro ICPF actuators for aqueous sensing and manipulation

Wenli Zhou, Wen J. Li

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 287 KB

english, 2004

5

High-energy ion implantation: an alternative technology for micromachining three-dimensional GaAs structures

Jianmin Miao, Hans L. Hartnagel

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 232 KB

english, 2004

6

Anodic bonding for monolithically integrated MEMS

K. Schjølberg-Henriksen, G.U. Jensen, A. Hanneborg, H. Jakobsen

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 310 KB

english, 2004

7

Electrostatic actuated micro gripper using an amplification mechanism

Olivier Millet, Paul Bernardoni, Stéphane Régnier, Philippe Bidaud, Elli Tsitsiris, Dominique Collard, Lionel Buchaillot

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 471 KB

english, 2004

8

A novel actuation mechanism on the basis of ferromagnetic SMA thin films

M. Kohl, D. Brugger, M. Ohtsuka, T. Takagi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 262 KB

english, 2004

9

Microneedle array for transdermal biological fluid extraction and in situ analysis

E.V. Mukerjee, S.D. Collins, R.R. Isseroff, R.L. Smith

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 449 KB

english, 2004

10

Advanced, vibration-resistant, comb-drive actuators for use in a tunable laser source

John D. Grade, Kevin Y. Yasumura, Hal Jerman

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 561 KB

english, 2004

11

Silicon anisotropic etching without attacking aluminum with Si and oxidizing agent dissolved in TMAH solution

Norio Fujitsuka, Kanae Hamaguchi, Hirofumi Funabashi, Eishi Kawasaki, Tsuyoshi Fukada

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 369 KB

english, 2004

12

Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning

Kaoru Yamashita, Latpasamixay Chansomphou, Hideyuki Murakami, Masanori Okuyama

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 555 KB

english, 2004

13

Improvement of an infrared light sensitivity in PZT photosensitive field emitter

Daisuke Takamuro, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 392 KB

english, 2004

14

Fluid–structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu, Tianhong Cui, Zhaoying Zhou, Kun Lian, Jost Goettert

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 156 KB

english, 2004

15

Basic characteristics of an electrochemical etching of Ni–Fe containing corrosion resistant alloys

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 527 KB

english, 2004

16

Characterization of fluidic microassembly for immobilization and positioning of Drosophila embryos in 2-D arrays

Ralph W. Bernstein, Xiaojing Zhang, Stefan Zappe, Matt Fish, Matthew Scott, Olav Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 267 KB

english, 2004

17

Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability

D. Lee, U. Krishnamoorthy, K. Yu, O. Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 551 KB

english, 2004

18

Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuator

Takayuki Shibata, Kazuya Unno, Eiji Makino, Shiro Shimada

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 363 KB

english, 2004

19

Experimental study of micromachined electrostatic torsion actuators with full travel range

Zhixiong Xiao, K.R. Farmer

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 237 KB

english, 2004

20

Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection

X.J. Zhang, S. Zappe, R.W. Bernstein, O. Sahin, C.-C. Chen, M. Fish, M.P. Scott, O. Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 487 KB

english, 2004

21

Thermal design modifications to improve firing frequency of back shooting inkjet printhead

S.J. Shin, K. Kuk, J.W. Shin, C.S. Lee, Y.S. Oh, S.O. Park

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 251 KB

english, 2004

22

High-resolution imaging of elastic properties using harmonic cantilevers

O. Sahin, G. Yaralioglu, R. Grow, S.F. Zappe, A. Atalar, C. Quate, O. Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 621 KB

english, 2004

23

A micro pitch and roll motion sensor

Jongbaeg Kim, Liwei Lin

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 638 KB

english, 2004

24

Polymeric micro-cantilever array for auditory front-end processing

Tao Xu, Mark Bachman, Fan-Gang Zeng, Guann-Pyng Li

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 402 KB

english, 2004

25

Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

Hiroshi Tanaka, Shuichi Yamashita, Yoshitsugu Abe, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 474 KB

english, 2004

26

Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass

Hae-Seok Park, Jun-Sik Hwang, Won-Youl Choi, Dong-Sik Shim, Kyoung-Won Na, Sang-On Choi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 381 KB

english, 2004

27

Amicromachined active tactile sensor for hardness detection

Yoshihiro Hasegawa, Mitsuhiro Shikida, Takeshi Shimizu, Takaaki Miyaji, Hikaru Sasaki, Kazuo Sato, Koichi Itoigawa

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 335 KB

english, 2004

28

Micromachined CMOS thermoelectric generators as on-chip power supply

M. Strasser, R. Aigner, C. Lauterbach, T.F. Sturm, M. Franosch, G. Wachutka

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 356 KB

english, 2004

29

Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N.Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Tak

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 381 KB

english, 2004

30

Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography

Jen-Shiang Wang, Il Woong Jung, Olav Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 590 KB

english, 2004

31

Soft printing of droplets pre-metered by electrowetting

Ui-Chong Yi, Chang-Jin “CJ” Kim

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 573 KB

english, 2004

32

Development of three-dimensional electrostatic stages for scanning probe microscope

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 366 KB

english, 2004

33

Micro chamber for cellar analysis integrated with negligible dead volume sample injector

Masaki Kanai, Hirohisa Abe, Tatsuya Munaka, Yoichi Fujiyama, Daisuke Uchida, Asako Yamayoshi, Hiroaki Nakanishi, Akira Murakami, Shuichi Shoji

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 412 KB

english, 2004

34

Fundamental studies on micro-droplet movement by Marangoni and capillary effects

Yuan-Tai Tseng, Fan-Gang Tseng, Yu-Feng Chen, Ching-Chang Chieng

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 672 KB

english, 2004

35

Microwave bonding of polymer-based substrates for potential encapsulated micro/nanofluidic device fabrication

Kin Fong Lei, Syed Ahsan, Nasser Budraa, Wen J. Li, John D. Mai

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 443 KB

english, 2004

36

Measurement of flow direction and velocity using a micromachined flow sensor

Seunghyun Kim, Teckjin Nam, Sekwang Park

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 410 KB

english, 2004

37

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

A. Höchst, R. Scheuerer, H. Stahl, F. Fischer, L. Metzger, R. Reichenbach, F. Lärmer, S. Kronmüller, S. Watcham, C. Rusu, A. Witvrouw, R. Gunn

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 343 KB

english, 2004

38

Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition

Younghak Cho, Tony Kuki, Yamato Fukuta, Hiroyuki Fujita, Beomjoon Kim

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 263 KB

english, 2004

39

Electrostatic inchworm microsystem with long range translation

M.V. Shutov, D.L. Howard, E.E. Sandoz, J.M. Sirota, R.L. Smith, S.D. Collins

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 445 KB

english, 2004

40

A novel back-shooting inkjet printhead using trench-filling and SOI wafer

S.S. Baek, H.-T. Lim, H. Song, Y.-S. Kim, K.-D. Bae, C.-H. Cho, C.-S. Lee, J.-W. Shin, S.-J. Shin, K. Kuk, Y.-S. Oh

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 339 KB

english, 2004

41

Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage

Seong-Hyok Kim, Youngjoo Yee, Junghoon Choi, Hyouk Kwon, Man-Hyo Ha, Changhoon Oh, Jong Uk Bu

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 711 KB

english, 2004

42

Package embedded heat exchanger for stacked multi-chip module

Haehyung Lee, Yongwon Jeong, Joonghan Shin, Joonghyun Baek, Moonkoo Kang, Kukjin Chun

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 325 KB

english, 2004

43

Fabrication of nanofluidic devices using glass-to-glass anodic bonding

V.G. Kutchoukov, F. Laugere, W. van der Vlist, L. Pakula, Y. Garini, A. Bossche

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 453 KB

english, 2004

44

A disposable, dead volume-free and leak-free in-plane PDMS microvalve

Jeung Sang Go, Shuichi Shoji

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 493 KB

english, 2004

45

In-plane single-crystal-silicon microneedles for minimally invasive microfluid systems

Seung-Joon Paik, Sangwon Byun, Jung-Min Lim, Yonghwa Park, Ahra Lee, Seok Chung, Junkeun Chang, Kukjin Chun, Dongil “Dan” Cho

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 565 KB

english, 2004

46

Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist

Li Li, Takashi Abe, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 226 KB

english, 2004

47

AFM characterization of out-of-plane high frequency microresonators

Steve Ryder, Ki Bang Lee, Xiaofan Meng, Liwei Lin

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 369 KB

english, 2004

48

Low frequency wireless powering of microsystems using piezoelectric–magnetostrictive laminate composites

Andrey Bayrashev, William P. Robbins, Babak Ziaie

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 139 KB

english, 2004

49

Robust SOI process without footing and its application to ultra high-performance microgyroscopes

Jongpal Kim, Sangjun Park, Donghun Kwak, Hyoungho Ko, William Carr, James Buss, Dong-il Dan Cho

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 598 KB

english, 2004

50

Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

Tianhong Cui, Feng Hua, Yuri Lvov

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 201 KB

english, 2004

51

Optical confinement and colour separation in a double colour laser scanned photodiode (D/CLSP)

M. Vieira, M. Fernandes, P. Louro, A. Fantoni, I. Rodrigues

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 224 KB

english, 2004

52

Heat exchanger fabrication with arrays of sensors and heaters with its micro-scale impingement cooling process analysis and measurements

C.H. Shen, C. Gau

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 298 KB

english, 2004

53

Simulation and realization of a novel micromechanical bi-stable switch

Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 418 KB

english, 2004

54

Design and fabrication of thermal actuators used for a micro-optical bench: application to a tunable Fabry-Perot filter

E. Pichonat-Gallois, V. Petrini, M. de Labachelerie

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 267 KB

english, 2004

55

Fabrication of a fluid encapsulated dermal patch using multilayered SU-8

A.P. Gadre, A.J. Nijdam, J.A. Garra, A.H. Monica, M.C. Cheng, C. Luo, Y.N. Srivastava, T.W. Schneider, T.J. Long, R.C. White, M. Paranjape, J.F. Currie

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 442 KB

english, 2004

56

The temperature compensation of a thermal flow sensor by changing the slope and the ratio of resistances

Teckjin Nam, Seunghyun Kim, Sekwang Park

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 246 KB

english, 2004

57

A micro Fabry–Perot sensor for nano-lateral displacement sensing with enhanced sensitivity and pressure resistance

Chun-Jun Lin, Fan-Gang Tseng

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 460 KB

english, 2004

58

Electrowetting-based pico-liter liquid actuation in a glass-tube microinjector

Kazunori Hoshino, Soroj Triteyaprasert, Kiyoshi Matsumoto, Isao Shimoyama

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 106 KB

english, 2004

59

Theoretical modeling and experimental investigation of MIS radiation sensor with giant internal signal amplification

Alexander Malik, Volodymyr Grimalsky, Alfonso Torres Jacome, Daniel Durini

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 228 KB

english, 2004

60

Inside Front Cover - editorial board

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 56 KB

english, 2004

61

Conference Calendar

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 28 KB

english, 2004

62

List of Conferences

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 38 KB

english, 2004

63

Author Index

Journal:

Sensors and Actuators A: Physical

Year:

2004

File:

PDF, 37 KB

2004

64

Subject Index

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 79 KB

english, 2004

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