Anodic bonding for monolithically integrated MEMS
K. Schjølberg-Henriksen, G.U. Jensen, A. Hanneborg, H. JakobsenVolume:
114
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2003.11.003
File:
PDF, 310 KB
english, 2004