Single-crystalline silicon micromirrors actuated by...

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 2-3

Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability

D. Lee, U. Krishnamoorthy, K. Yu, O. Solgaard
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
114
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2003.11.024
File:
PDF, 551 KB
english, 2004
Conversion to is in progress
Conversion to is failed