Lithographic approach to pattern multiple nanoparticle thin...

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 2-3

Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

Tianhong Cui, Feng Hua, Yuri Lvov
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Volume:
114
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.sna.2004.01.023
File:
PDF, 201 KB
english, 2004
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