Design and fabrication of thermal actuators used for a...

Sensors and Actuators A: Physical 2004 Vol. 114; Iss. 2-3

Design and fabrication of thermal actuators used for a micro-optical bench: application to a tunable Fabry-Perot filter

E. Pichonat-Gallois, V. Petrini, M. de Labachelerie
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Volume:
114
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2004.01.035
File:
PDF, 267 KB
english, 2004
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