Microfabrication of 3D silicon MEMS structures using...

Sensors and Actuators A: Physical 2005 Vol. 119; Iss. 1

Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

C.M. Waits, B. Morgan, M. Kastantin, R. Ghodssi
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Volume:
119
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2004.03.024
File:
PDF, 402 KB
english, 2005
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