Development and analysis of the vertical capacitive...

Sensors and Actuators A: Physical 2005 Vol. 119; Iss. 1

Development and analysis of the vertical capacitive accelerometer

Innam Lee, Gil Ho Yoon, Jungyul Park, Seonho Seok, Kukjin Chun, Kyo-Il Lee
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Volume:
119
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2004.06.033
File:
PDF, 537 KB
english, 2005
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