Polycrystalline 3C-SiC thin films deposited by dual...

Sensors and Actuators A: Physical 2005 Vol. 119; Iss. 1

Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications

Xiao-An Fu, Jeremy L. Dunning, Christian A. Zorman, Mehran Mehregany
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
119
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2004.09.009
File:
PDF, 435 KB
english, 2005
Conversion to is in progress
Conversion to is failed