Control of Oxygen Precipitation in Silicon by Infrared...

Solid State Phenomena 2005 Vol. 108-109

Control of Oxygen Precipitation in Silicon by Infrared Laser Irradiation

Yamada-Kaneta, Hiroshi, Tanahashi, K.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.245
File:
PDF, 287 KB
english, 2005
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