Gettering of Iron Using Electrically Inactive Boron Doped Layer
Tomita, Hiroshi, Saito, Mami, Yamabe, KikuoVolume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1991
File:
PDF, 365 KB
1995