Evolution of Hydrogen Related Defects in Plasma...

Evolution of Hydrogen Related Defects in Plasma Hydrogenated Crystalline Silicon under Thermal and Laser Annealing

Ma, Yue, Huang, Yue Long, Job, Reinhart, Düngen, Wolfgang, Fahrner, Wolfgang R.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.211
File:
PDF, 495 KB
english, 2005
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