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Evolution of Hydrogen Related Defects in Plasma Hydrogenated Crystalline Silicon under Thermal and Laser Annealing
Ma, Yue, Huang, Yue Long, Job, Reinhart, Düngen, Wolfgang, Fahrner, Wolfgang R.Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.211
File:
PDF, 495 KB
english, 2005