Non-conventional routes to SiGe:P/Si(100) materials and...

Semiconductor Science and Technology 2015 / 04 Vol. 30; Iss. 4

Non-conventional routes to SiGe:P/Si(100) materials and devices based on -SiH 3 and -GeH 3 derivatives of phosphorus: synthesis, electrical performance and optical behavior

Xu, Chi, Gallagher, J D, Sims, P, Smith, D J, Menéndez, J, Kouvetakis, J
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Volume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/4/045007
Date:
April, 2015
File:
PDF, 1.83 MB
english, 2015
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