Initial Stage of Oxygen Precipitation in Silicon

Solid State Phenomena 1997 Vol. 57-58

Initial Stage of Oxygen Precipitation in Silicon

Kornylo, A., Maksymov, A., Pashkovski, M., Savytskii, I.
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Volume:
57-58
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.167
File:
PDF, 348 KB
1997
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