A Novel Vapor Phase Etching Process for Si

A Novel Vapor Phase Etching Process for Si

Verhaverbeke, Steven
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.239
File:
PDF, 10.73 MB
english, 2009
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