Smart-Cut® technology: from 300 mm ultrathin SOI production...

Solid-State Electronics 2004 Vol. 48; Iss. 6

Smart-Cut® technology: from 300 mm ultrathin SOI production to advanced engineered substrates

Christophe Maleville, Carlos Mazuré
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Volume:
48
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.sse.2003.12.029
File:
PDF, 691 KB
english, 2004
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