Strained Si, SiGe, and Ge on-insulator: review of wafer bonding fabrication techniques
Gianni Taraschi, Arthur J. Pitera, Eugene A. FitzgeraldVolume:
48
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.sse.2004.01.012
File:
PDF, 477 KB
english, 2004