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A comparative study of different contact resistance test structures dedicated to the power process technology
Slimane Oussalah, Boualem Djezzar, Robert JerisianVolume:
49
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2005.08.004
File:
PDF, 354 KB
english, 2005