Minimization of MuGFET source/drain resistance using wrap-around NiSi-HDD contacts
A. Dixit, K.G. Anil, N. Collaert, P. Zimmerman, M. Jurczak, K. De MeyerVolume:
50
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2006.05.025
File:
PDF, 421 KB
english, 2006