Influence of different deposition conditions of top and...

Solid-State Electronics 2006 Vol. 50; Iss. 7-8

Influence of different deposition conditions of top and bottom electrode on the reliability of Sr0.8Bi2.2Ta2O9 ferroelectric capacitors

L. Goux, Z. Xu, V. Paraschiv, J.G. Lisoni, D. Maes, L. Haspeslagh, G. Groeseneken, D.J. Wouters
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Volume:
50
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2006.06.010
File:
PDF, 400 KB
english, 2006
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