Application of PVD silver for integrated microwave passives in silicon technology
V.V. Levenets, R.E. Amaya, N.G. Tarr, T.J. SmyVolume:
50
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sse.2006.06.014
File:
PDF, 422 KB
english, 2006