Modeling and optimization of series resistance of planar MIM capacitors
A. Bajolet, R. Clerc, G. Pananakakis, E. Picollet, N. Segura, S. Boret, S. Bruyère, J.P. Manceau, J.-C. Giraudin, P. Delpech, L. Montès, G. GhibaudoVolume:
50
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sse.2006.06.015
File:
PDF, 532 KB
english, 2006