Modeling and optimization of series resistance of planar...

Modeling and optimization of series resistance of planar MIM capacitors

A. Bajolet, R. Clerc, G. Pananakakis, E. Picollet, N. Segura, S. Boret, S. Bruyère, J.P. Manceau, J.-C. Giraudin, P. Delpech, L. Montès, G. Ghibaudo
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Volume:
50
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sse.2006.06.015
File:
PDF, 532 KB
english, 2006
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