Investigation of oxygen annealing effects on RF sputter deposited SiC thin films
R.M. Todi, K.B. Sundaram, A.P. Warren, K. ScammonVolume:
50
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.sse.2006.06.021
File:
PDF, 1.29 MB
english, 2006