Cantilever-type microheater fabricated with thick silicon
Ma, Hongyu, Wang, Wenjuan, Ding, Enjie, Zhao, Xiaohu, Cheng, TingtingVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2288-3
Date:
April, 2015
File:
PDF, 5.19 MB
english, 2015