Electromechanical modeling and simulation by the Euler–Lagrange method of a MEMS inertial sensor using a FGMOS as a transducer
Abarca-Jiménez, G. Stephany, Reyes-Barranca, M. Alfredo, Mendoza-Acevedo, Salvador, Munguía-Cervantes, Jacobo E., Alemán-Arce, Miguel A.Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2429-3
Date:
April, 2016
File:
PDF, 949 KB
english, 2016