Volume 22; Issue 4

Microsystem Technologies

Volume 22; Issue 4
2

Robust controller design of SGCMG driven by hollow USM

Year:
2016
Language:
english
File:
PDF, 530 KB
english, 2016
4

Nanogaps formation and characterization via chemical and oxidation methods

Year:
2016
Language:
english
File:
PDF, 1.52 MB
english, 2016
16

MEMS-based monolithic three-axis fiber-optic acceleration sensor

Year:
2016
Language:
english
File:
PDF, 1.37 MB
english, 2016
21

Au decorated ZnO thin film: application to DNA sensing

Year:
2016
Language:
english
File:
PDF, 822 KB
english, 2016
23

Electrostatically actuated MEMS relay arrays for high-power applications

Year:
2016
Language:
english
File:
PDF, 1.00 MB
english, 2016