Effects of nitrogen incorporation into lanthana film by...

Solid-State Electronics 2009 Vol. 53; Iss. 3

Effects of nitrogen incorporation into lanthana film by plasma immersion ion implantation

Banani Sen, Hei Wong, B.L. Yang, P.K. Chu, K. Kakushima, H. Iwai
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Volume:
53
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.sse.2009.01.009
File:
PDF, 484 KB
english, 2009
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