A Comparison of Particle Filtration in a Recirculated Wet...

Solid State Phenomena 2005 Vol. 103-104

A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters

Haas, Günter, Parekh, Bipin, Frankhauser, Jeremie, Viallet, Benoît, Palka, Patrick, Bras, Jérôme
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Volume:
103-104
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.103-104.171
File:
PDF, 288 KB
english, 2005
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