Influence of Point Defect Concentration in Growing CZ-SI on...

Influence of Point Defect Concentration in Growing CZ-SI on the Formation Temperature of the Defects Affecting Gate Oxide Integrity

Iwasaki, T., Harada, Hiroshi, Haga, Hiroyo
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1731
File:
PDF, 458 KB
1995
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