Radiation Induced Transformation of Impurity Centers in the...

Radiation Induced Transformation of Impurity Centers in the Gate Oxide of Short-Channel SOI MOSFETS

Evtukh, A., Kizjak, A., Litovchenko, V.G., Claeys, C., Simoen, Eddy
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.469
File:
PDF, 2.23 MB
english, 2005
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